It uses non-contact white light interferometry (WSI) technology and measures surfaces at high resolution (0.1nm) and a fast speed (2 sec). It presents measurement results in 2D and 3D forms.
vertical scan speed: 2.4um/s~12um/sec
max workpiece height <100mm
x/y axis resolution: 0.1um
x/y stage stroke <300mm
z axis resolution: 0.1um
It is used to measure the surface height, width, width and roughness of fabricated microdevices and to check the channels in the platform when manufacturing a micro test platform (biochip).
It may be widely used in a wide range of fields such as semiconductors, mining, and nano/micro advanced materials.
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