This system performs patterning of 3D microstructures over a large area using the interference effects of laser light sources. Photoresists in liquid form are solidified using laser.
1. Femtosecond fiber laser pulse length (120 fs Average Power) 120mW
2. Output size: within 10 x 10 x 10mm
3. x-y resolution: <0.5um, z resolution: <1um
[All areas requiring micro-sized parts]
- Micro optics
- Maskless lithography
- Biochip
- Rapid prototyping, etc.
ⓒ KIMIRo. All rights reserved.
